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| KLA8100 Parts | Parts Description |
|---|---|
| KLA-Tencor PN 0132109-000 | Kit, Replacement, 2-Flex Z-Stage, 8100XPR |
| KLA-Tencor PN 210-00709-000 | Filter Air, Machine type 8100XP |
| KLA-Tencor PN 210-08898-000 | High Vacuum Valve, Load Lock, 8300 |
| KLA-Tencor PN 500-01429-000 | PCB, Keithley REM-64 Communications |
| KLA-Tencor PN 500-01430-000 | PCB, Keithley MAO-8 D/A Converter |
| KLA-Tencor PN 500-01431-000 | PCB, Keithley MAI-16 A/D Converter |
| KLA-Tencor PN 500-01432-000 | PCB, Keithley MII-32 Digital Input |
| KLA-Tencor PN 720-01920-002 | Assy, Arm Lifter, 8xxx |
| KLA-Tencor PN 720-02840-003 | Assy, Rotate, Transfer Arm |
| KLA-Tencor PN 720-02841-500 | Assy, Motor, X |
| KLA-Tencor PN 720-02842-500 | Assy, Motor, Y |
| KLA-Tencor PN 720-02847-000 | Assy, Chassis, MCA Module, 8100 |
| KLA-Tencor PN 720-02851-000 | Assy, DC Distribution Chasis |
| KLA-Tencor PN 720-07292-001 | Assy, Arm Lifter, 8100XP |