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| KLA8100 Parts | Parts Description |
|---|---|
| KLA-Tencor PN 0132109-000 | Kit, Replacement, 2-Flex Z-Stage, 8100XPR |
| KLA-Tencor PN 210-00709-000 | Filter Air, Machine type 8100XP |
| KLA-Tencor PN 210-08898-000 | High Vacuum Valve, Load Lock, 8300 |
| KLA-Tencor PN 500-01429-000 | PCB, Keithley REM-64 Communications |
| KLA-Tencor PN 500-01430-000 | PCB, Keithley MAO-8 D/A Converter |
| KLA-Tencor PN 500-01431-000 | PCB, Keithley MAI-16 A/D Converter |
| KLA-Tencor PN 500-01432-000 | PCB, Keithley MII-32 Digital Input |
| KLA-Tencor PN 720-01920-002 | Assy, Arm Lifter, 8xxx |
| KLA-Tencor PN 720-02840-003 | Assy, Rotate, Transfer Arm |
| KLA-Tencor PN 720-02841-500 | Assy, Motor, X |
| KLA-Tencor PN 720-02842-500 | Assy, Motor, Y |
| KLA-Tencor PN 720-02847-000 | Assy, Chassis, MCA Module, 8100 |
| KLA-Tencor PN 720-02851-000 | Assy, DC Distribution Chasis |
| KLA-Tencor PN 720-07292-001 | Assy, Arm Lifter, 8100XP |
| KLA-Tencor PN 720-07335-000 | Advantech IPC-6706/6751, Chassis, ISABUS II |
| KLA-Tencor PN 720-07357-000 | Assy. Loadlock, 8300 |
| KLA-Tencor PN 720-07515-001 | Assy, Lower Quadruple |
| KLA-Tencor PN 720-07707-001 | Assy, Docking Chamber |
| KLA-Tencor PN 720-08276-002 | Assy, Loadlock, 8100E |
| KLA-Tencor PN 720-08906-000 | Assy Stage X-Y 8300 |
| KLA-Tencor PN 720-09339-000 | Assy Elevator, Centered for 8300 |
| KLA-Tencor PN 720-09354-001 | IA USE 16709 Assy, Loadlock, 8100 XPR/XPT |
| KLA-Tencor PN 720-09841-001 | Assy, Wehnelt/Condenser Power Supply |
| KLA-Tencor PN 720-10288-001 | Assy Elevator Round with Pads |
| KLA-Tencor PN 720-12663-000 | Assy, Drive, X-Axis |
| KLA-Tencor PN 720-12799-000 | Assy, Turbo Pump Isolator |
| KLA-Tencor PN 720-16771-000 | Assy, Drive, X-Axis |
| KLA-Tencor PN 720-16934-000 | Assy, 8300 Turbo Pump Isolator FRU |
| KLA-Tencor PN 720-16989-000 | Assy, Handle, Reticle Pick |
| KLA-Tencor PN 720-17045-000 | Assy, RETICLE Carrier 6", 8100XPR, Ceq. Compatible |
| KLA-Tencor PN 720-17080-000 | Assy. Reticle Carrier Base 5" |
| KLA-Tencor PN 720-17255-000 | Assy, End Effector, 8100XP |
| KLA-Tencor PN 720-17458-000 | Assy, Kinematic Chuck, Adjustable |
